FABMOVER — Cleanroom AMR for Semiconductor Pod & Cassette Handling
SEMI E82/E84 compliant. KUKA LBR iiwa / iisy. Built for existing fab layouts.
Fabmover
The FABMOVER automates the most contamination-sensitive material handling tasks in semiconductor cleanrooms: pod transport, cassette handling, and FOUP opening and closing. The result is less manual intervention and more consistent throughput.
Key Features
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Pod Handling
- Automates wafer pod transport, loading, unloading.
- Eliminates manual handling → fewer contamination events.
- Stationary and onboard pod opener/closer modules.
Cassette Handling
- Up to 8 cassettes simultaneously.
- Precise repeatable handling in cleanroom ISO classes.
- Scalable to evolving production volumes.
SEMI E82 / E84 Software
- SEMI E82: host system & MCS connectivity.
- SEMI E84: direct machine-to-robot communication.
- Custom interfaces for process control software.
Web-Based Fleet Monitor
- Real-time: location, battery, load status.
- Multi-user authentication, mobile-friendly.
- Job monitoring dashboard.
Automated Pod & Cassette Flow
The FABMOVER runs a continuous, fully automated material flow cycle, from navigation to delivery and back again. That cuts manual handling and keeps production moving.
01
Navigate
The FABMOVER navigates autonomously through the cleanroom to the source station. Onboard sensors handle obstacle avoidance and keep the unit compliant with cleanroom movement protocols.
02
Pick pod/Cassette
The KUKA LBR iisy or iiwa robot arm picks the pod or cassette from the station using a purpose-designed end effector. The onboard pod opener and closer handles FOUP access automatically.
03
Load Buffer
The picked item is secured in one of up to eight onboard buffer slots. Multiple pods or cassettes can be carried in a single journey, which lifts effective throughput.
04
Deliver
The FABMOVER navigates to the destination station and positions itself precisely for handoff. SEMI E84 communication confirms the machine is ready to receive before the robot proceeds.
05
Unload
The robot arm places the pod or cassette at the destination station with repeatable precision. The transfer is confirmed by a SEMI E84 handshake with the receiving machine.
06
Repeat
The FABMOVER returns for the next assignment, either picking up at the current location or navigating to the next task as directed by the fleet management system.
Specs
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Robot Options
KUKA LBR iisy 6-axis (standard configuration) or KUKA LBR iiwa 7-axis (extended reach and flexibility). Selection depends on pod size, reach requirements and cleanroom class. [CLIENT TO CONFIRM specific robot models for current FABMOVER generation].
Buffer Capacity
Up to 8 onboard buffer slots for simultaneous transport of pods or cassettes. Exact configuration depends on pod size and application. Carrying several items per journey reduces the number of trips required per production cycle.
Cleanroom ISO Class
Designed for semiconductor cleanroom environments. Compatible with SEMI-standard cleanroom classifications. [CLIENT TO CONFIRM specific ISO class rating for current FABMOVER generation].
Software Interfaces
SEMI E82 for connectivity to host systems and Material Control Systems (MCS). SEMI E84 for direct machine-to-robot communication during safe load and unload transfers. Custom interfaces for process control and fleet management software are available on request.
Projects
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Related Services
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MRP
The Mobile Robot Platform: a decoupled system that moves an industrial robot between docking stations. It combines AGV flexibility with stationary-robot precision at payloads up to 300 kg.
AGV / AMR
Autonomous mobile platforms for internal transport. The range runs from compact workstation-linking AGVs through to heavy-load systems handling several tons.
Industrial Automation
Custom robot cells, gripper development, AI vision and factory automation, engineered to work alongside your AGV fleet.
Mobile Robots
KUKA KMR series: mobile manipulators that put a robot arm on an autonomous mobile base. Available in payload classes from 7 kg up to 300 kg.
Frequently asked questions
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SEMI E82 (AMHS Interbay/Intrabay Universal Transport Interface) is a standard communication protocol that defines how an Automated Material Handling System (AMHS), including AGVs and AMRs, communicates with the host system and Material Control System (MCS) in a semiconductor fab. It governs job assignment, vehicle tracking and system status reporting.
The FABMOVER is engineered for semiconductor cleanroom environments. The exact ISO class compatibility depends on the configuration selected. Contact BEC for the cleanroom qualification information that applies to your facility. [CLIENT TO CONFIRM].
We offer a 30-day return policy for all products. Items must be in their original condition, unused, and include the receipt or proof of purchase. Refunds are processed within 5-7 business days of receiving the returned item.
The FABMOVER can carry up to 8 cassettes or pods at once in its onboard buffer. Exact capacity depends on the cassette or FOUP format used in your facility. Contact BEC to confirm compatibility with your specific carrier type.
Contact Form
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Interested in FABMOVER for Your Fab?
Tell us about your facility, your pod or cassette format, and your throughput requirements. BEC's engineers will provide an initial assessment and walk through how it would integrate with your existing AMHS.